HBO 5510 W/PIHL
Areas of application
- Microlithography
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.
Technical Data
General Product Information
Global order reference
HBO 5510W/PIHL
Product number (Americas)
69556
Product name (Americas)
HBO 5510W/PIHL 1/CS 1/SKU
Family brand
HBO
General description
5,500 watts, Mercury short arc, DE lamps for semi applications for use ,in ASML XT:400F, XT:450E, XT:450F and future AT:400D scann
er
Product remark
Lamp contains overpressure even in cold status - additional safety regulations, supplied with the lamps, have to be fulfilled. Please read Technical bulletin DO-SEM TB 004 carefully
Electrical Data
Nominal wattage
5500 W
Nominal voltage
29.0 V
Nominal current
190 A
Type of current
DC
Photometric Data
Light center length (LCL)
154.0 mm
Physical Attributes & Dimensions
Electrode gap (cold)
5.5 mm
Diameter (in)
3.346 in
Diameter
85.0 mm
Length
352.5 mm
Length with base excl. base pins/connection
352.50 mm
Connector: presence
Yes
Product weight
2200.00 g
Operating Conditions
Burning position
Other
Lifetime Data
Nominal lifetime
1500 hr
Environmental & Regulatory Information
Information according Art. 33 of EU Regulation (EC) 1907/2006 (REACh)
Primary article identifier
4008321355799
Date of declaration
26-06-2024
Declaration no. in SCIP database
b89719ab-c1e6-4c02-9129-76d93997743b
Candidate list substance 1
Lead
CAS No. of substance 1
7439-92-1
Safe use instruction
The identification of the Candidate List substance is sufficient to allow safe use of the article.
Packaging information
EAN |
Unit |
Piece |
Dimension l x w x h |
Weight |
Volume |
|---|---|---|---|---|---|
| 4008321355799 |
VS
| 1 | 340mm x 340mm x 900mm | 5164.00g | 104.04dm³ |