HBO Microlithography Lamps for Nikon i-line Systems

Areas of application
  • Microlithography
Safety advice
Because of their high luminance, UV radiation and high internal pressure (when hot) HBO lamps may only be operated in enclosed lamp casings specially constructed for the purpose. Mercury is released if the lamp breaks. Special safety precautions must be taken. More information is available on request or can be found in the leaflet included with the lamp or in the operating instructions.

Information about Family

HBO lamps > 200W are designed to meet the high demands of the Semiconductor industry. With peak intensity at 365nm these lamps are ideal for microlithography and are designed and qualified for specific equipment manufacturers.

Products

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Product
Nominal wattage
Nominal voltage
Light center length (LCL)
Length
Data sheet
HBO 1000 W/NEL
750 W 47.0 V 84.5 mm 187.0 mm
HBO 1002 W/NEL
750 W 47.0 V 78.5 mm 187.0 mm
HBO 1002 W/NIL
27.1 V 78.5 mm 190.0 mm
HBO 2001 W/NIL
1750 W 26.0 V 122.25 mm 251.0 mm
HBO 2000 W/NIL
1750 W 26.0 V 112.25 mm 219.0 mm
HBO 2001 W/NIEL
1750 W 26.0 V 112.0 mm 251.0 mm
HBO 2002 W/NIL
1750 W 26.0 V 107.75 mm 232.0 mm
HBO 2011 W/NIL
2011 W 25 V 107.75 mm 256.0 mm
HBO 2011 W/NILH
2011 W 24.0 V 107.75 mm 234.0 mm
HBO 2501 W/NIL
2500 W 23.0 V 157.75 mm 357.0 mm
HBO 2510 W/NIL
2500 W 23.0 V 157.75 mm 357.0 mm
HBO 3500 W/NIL
3500 W 27.0 V 180.0 mm 382.0 mm